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ILH550 Thin Film In-Line System


Plasma Quest - ILH550 Thin Film In-Line System

  • Load-lock system
  • Up to 16" square substrates
  • High rate, low stress films
  • Fully automatic control
  • Modular layout allows 2 substrates to be simultaneously scanned on opposite side of the target
  • Modular design allows for future web handling upgrade
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