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Indium Tin Oxide


Indium Tin Oxide (ITO)

PQL have developed high rate deposition of good quality ITO films onto polymeric material with no substrate heating or post annealing, the properties are as follows:

  • Low temperature process - Deposition onto Kapton, PEN and PET
  • Sheet resistance of 3.3Ω/ has been achieved (ρ=3.3x10-4 Ωcm)
  • Peak transmission of 98% with a sheet resistance 10 Ω/
  • Deposition rates of up to 90nm/min
  • Properties are retained when flexed through a 1.5 cm bend radius


Download a printable version of ITO summary.pdf

Downloaded our latest publication on ITO films.pdf

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