Plasma Quest Logo
Tel: +44(0)1256 740680

E-mail: sales@plasmaquest.co.uk

             View Plasma Quest’s profile on LinkedIn

Barrier Layers

 

Plasma Quest Ltd (PQL) have developed a process for stable, uniform, high rate deposition of good quality low temperature alumina (Al203) films. Our technology can be used to develop barrier layers suitable for use in OLED devices.

  • Low temperature process (deposition onto flexible)
  • Deposition rate up to 100nm/min.
  • No need for pulsed DC or feedback control (automatic or manual) of the oxygen gas flow.
  • Excellent thickness and optical uniformity (<1% variation across a 6" dia. substrate).
  • Intrinsically low stress, to permit reliable step coverage.
Google Analytics Alternative